TY  - GEN
AU  - Ranjana Kumari
AU  - Dr.Binsu J.Kailath
TI  - Study of mems structures with different materials
U1  - 621.375.6 RAN 
PY  - 2012///
CY  -  IIITDM Kancheepuram
PB  -  Dept of Electronics Engineering
KW  - MEMS
N1  - 
B.Tech - Theses

ER  -