000 00295 a2200109 4500
020 _a0387245200
082 _a621.396.6:621.382 LEO
245 _aMEMS/NEMS Handbook Techniques and Applications
_cCornelius T Leondes
260 _bSpringer
_c2006
942 _cREF
100 _aLeondes Cornelius T
_9943
999 _c1044
_d1044