| 000 | 00432 a2200121 4500 | ||
|---|---|---|---|
| 245 |
_aMEMS & Microsystems: Design Manufacture and Nanoscale Engineering _cTai-Ran Hsu |
||
| 250 | _a2nd Ed | ||
| 260 |
_bWiley _c2008 |
||
| 300 | _ax | ||
| 942 | _cBK | ||
| 100 |
_aHsu Tai-Ran _9283 |
||
| 952 |
_w2011-10-11 _p0001772 _r2012-12-27 _40 _00 _bIIITDM _10 _o621.375.6 HSU _d2011-10-11 _70 _cREF _2udc _g6695.00 _yREF _s2012-12-12 _l4 _aIIITDM |
||
| 999 |
_c605 _d605 |
||