| 000 | 00519nam a22001337a 4500 | ||
|---|---|---|---|
| 008 | 111201t xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9780849312625 | ||
| 100 |
_aLyshevski Sergey E _cMEMS and NEMS systems Devices and Structures _9326 |
||
| 245 |
_aMEMS and NEMS systems Devices and Structures _cSergey E Lyshevski |
||
| 260 |
_bCRC Press _c2002 |
||
| 300 | _a461p. | ||
| 942 |
_2ddc _cBK |
||
| 999 |
_c642 _d642 |
||
| 952 |
_p0001857 _40 _00 _bIIITDM _10 _o621.396.6:621.382 LYS _d2011-12-01 _8REF _70 _cREF _2udc _g695.00 _yBK _aIIITDM |
||